The Systemic Analysis of Metals Manufacturing Used in Mems Fabrication
نویسندگان
چکیده
The metals take a apart place in the materials range used at MEMSs fabrication, in special of associated materials, while of thin metals films are used in mediums with different capacities to obtain of masks for microsensors and microactuators. From this group the aluminium, titanium, copper, etc. are distinguished. In that case, the manufacturing problem of them in specific MEMSs conditions is tight linked of technological microsystem characteristics, as micro-machine tools, micro-tool, micro-devices and micro-part. This paper has a systemic analyzing of manufacturing process for aluminium, titanium and those alloys.
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